1.

Conference Proceedings
Conference Proceedings
1. ION BEAM SYNTHESIS OF BURIED CoSi2 LAYERS IN SiGe ALLOYS
Jebasinski, R. ; Mantl, S. ; Dieker, Chr. ; Dederichs, H. ; Vescan, L. ; Butz, R.
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.875-880,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings
Conference Proceedings
2. Strain Relaxation of He+ Implanted, Pseudomorphic Si1-xGex Layers on Si(100)
Hollander, B. ; Mantl, S. ; Lenk, St. ; Trinkaus, H. ; Kirch, D. ; Luysberg, M. ; Hackbarth, Th. ; Herzog, H.-J. ; Fichtner, P.F.P.
Pub. info.: Current issues in heteroepitaxial growth--stress relaxation and self assembly : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.  pp.75-80,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 696
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Conference Proceedings
Conference Proceedings
3. Ultrafast Silicon Based Internal Photoemission Detectors ..
Buchal, Ch. ; Kappius, L. ; Lipinsky, Th. ; Loken, M. ; Mantl, S.
Pub. info.: Flat-panel displays and sensors - principles, materials and processes : symposium held April 4-9, 1999, San Francisco, California, U.S.A..  pp.167-174,  2000.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 558
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Conference Proceedings
Conference Proceedings
4. CHANNELING INVESTIGATION OF THE LATTICE LOCATION OF Ti IN Ti-IMPLANTED OPTICAL WAVEGUIDES IN LiNbO3
Buchal, Ch. ; Mantl, S. ; Thomas, D. K.
Pub. info.: Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.317-322,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 100
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Conference Proceedings
Conference Proceedings
5. STRAIN MEASUREMENTS IN Si/Si0.5Ge0.5 SUPERLATTICES BY He ION CHANNELING
Mantl, S. ; Kasper, E. ; Jorke, H. J.
Pub. info.: Heteroepitaxy on silicon II : symposium held April 21-23, 1987, Anaheim, California, U.S.A..  pp.305-310,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 91
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Conference Proceedings
Conference Proceedings
6. SMOOTH SILICIDE FORMATION BY ION BEAM MIXING OF Ti/Si-LAYERS
Kohlhof, K. ; Mantl, S. ; Stritzker, B.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.443-448,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
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Conference Proceedings
Conference Proceedings
7. ALLOTAXY: A NEW METHOD FOR EPITAXIAL GROWTH OF COMPOUND THIN FILMS
Mantl, S. ; Bay. H. L. ; Dieker, Ch.
Pub. info.: Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A..  pp.221-226,  1992.  Pittsburgh, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 263
8.

Conference Proceedings
Conference Proceedings
8. INTERDIFFUSION OFMBE-GROWN SYMMETRICALLY AND ASYMMETRICALLY STRAINED Si/Si1-XGeX SUPERLLATICES INVESTIGATED BY ION SCATTERING
Hollander, B. ; Butz, R. ; Mantl, S.
Pub. info.: Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A..  pp.255-260,  1992.  Pittsburgh, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 263
9.

Conference Proceedings
Conference Proceedings
9. STRAIN IN MAGNETIC EuS/SrS SUPERLATTICES INVESTIGATED BY He ION CHANNELING
Mantl, S. ; Buchal, Ch. ; Stritzker, B. ; Saftic, B.
Pub. info.: Layered structures and epitaxy : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.195-200,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 56
10.

Conference Proceedings
Conference Proceedings
10. Quantum Transport in Ion-Beam-Synthesized Cobalt Disilicide Wires
Lenssen, D. ; Mesters, S. ; Mantl, S.
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.295-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
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Conference Proceedings
Conference Proceedings
11. THICKNESS DEPENDENCE OF ELECTRICAL TRANSPORT IN BURIED CoSi2 FILMS FABRICATED BY ION BEAM SYNTHESIS
Radermacher, K. ; Jebasinski, R. ; Mantl, S. ; Monroe, D. ; White, A. E. ; Short, K. T.
Pub. info.: Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.209-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 320
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Conference Proceedings
Conference Proceedings
12. ELECTRICAL AND OPTICAL PROPERTIES OF FeSi2 LAYERS
Radermacher, K. ; Skeide, O. ; Carius, R. ; Klomfass, J. ; Mantl, S.
Pub. info.: Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.115-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 320
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Conference Proceedings
Conference Proceedings
13. Effect of the Oxidation of a Silicide Layer on Dopant Diffusion in the Underlying Silicon
Kappius, L. ; Tyagi, A. K. ; Breuer, U. ; Bay, H. L. ; Mantl, S.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.225-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 568
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Conference Proceedings
Conference Proceedings
14. Growth, Patterning and Microelectronic Applications of Epitaxial CobaltDisilicide
Mantl, S. ; Kappius, L. ; Antons, A. ; Loken, M. ; Klinkhammer, F. ; Dolle, M. ; Zhao, Q. T. ; Mesters, S. ; Buchal, Ch. ; Bay, H. L. ; Kabius, B. ; Trinkaus, H. ; Heinig, K. H.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.145-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
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Conference Proceedings
Conference Proceedings
15. Nanopatterning of Thin CobaltDisilicide Layers by Local Oxidation
Klinkhammer, F. ; Kappius, L. ; Antons, A. ; Dolle, M. ; Trinkaus, H. ; Mesters, St. ; Bochem, H-P. ; Mantl, S. ; Heinig, K-H.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.163-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
16.

Conference Proceedings
Conference Proceedings
16. Ion-Scattering Studies of Defects in GaN Thin Films on c-Oriented Sapphire
Hollander, B. ; Mantl, S. ; Mayer, M. ; Kirchner, C. ; Pelzmann, A. ; Kamp, M. ; Christiansen, S. ; Albrecht, M. ; Strunk, H. P.
Pub. info.: Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.543-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 512
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Conference Proceedings
Conference Proceedings
17. Patterning of Silicide Layers by Local Oxidation
Dolle, M. ; Mantl, S. ; Hacke, M. ; Mesters, St. ; Bay, H. L.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.549-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
18.

Conference Proceedings
Conference Proceedings
18. GROWTH OF ION IMPLANTED BURIED FeSi2 ON Si(111) AND Si(100)
Radermacher, K. ; Mantl, S. ; Dieker, Ch. ; Holzbrecher, H. ; Speier, W. ; Luth, H.
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.273-278,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235
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Conference Proceedings
Conference Proceedings
19. Fabrication of SOI Substrates with Buried Silicide Layers for BiCMOS Applications
Wiemer, M. ; Zimmermann, S. ; Zhao, Q.T. ; Trui, B. ; Kaufmann, C. ; Mantl, S. ; Dudek, V. ; Gessner, T.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.303-310,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-02
20.

Conference Proceedings
Conference Proceedings
20. CoSi2 PRECIPITATE COARSENING DURING FORMATION OF BURIED EPITAXIAL CoSi2 LAYERS BY ION BEAM SYNTHESIS
Jebasinski, R. ; Mantl, S. ; Radermacher, K. ; Fichtner, P. ; Jager, W. ; Buchal, Ch.
Pub. info.: Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A..  pp.411-416,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 201
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Conference Proceedings
Conference Proceedings
21. (11.1) 3:10 - 3:40 PM - Strained Silicon on Relaxed SiGe Made by Ion Implantation and Strain Transfer (Invited)
Mantl, S. ; Buca, D. M. ; Hollander, B. ; Morschbacher, M. ; Trinkaus, H. ; Luysberg, M. ; Hueging, N. ; Carius, L. Houben'R. ; Loo, R. ; Caymax, M. ; Schafer, H. (ISG1-IT)
Pub. info.: SiGe: materials, processing, and devices : proceedings of the First international symposium.  pp.731-740,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-07
22.

Conference Proceedings
Conference Proceedings
22. The Use of Ion Implantation and Annealing for the Fabrication of Strained Silicon on Thin SiGe Virtual Substrates
Buca, D. ; Morschbacher, M.J. ; Hollander, B. ; Luysberg, M. ; Loo, R. ; Caymax, M. ; Mantl, S.
Pub. info.: High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.15-26,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 809
23.

Conference Proceedings
Conference Proceedings
23. Silicon Surface Chemistry by IR Spectroscopy in the Mid- to Far-IR Region: H2O and Ethanol on Si(100)
Struck, L. M. ; Eng, J., Jr. ; Bent, B. E. ; Chabal, Y. J. ; Williams, G. P. ; White, A. E. ; Christman, S. ; Chaban, E. E. ; Raghavachari, K. ; Flynn, G. W. ; Radermacher, K. ; Mantl, S.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.395-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386
24.

Conference Proceedings
Conference Proceedings
24. GROWTH OF BURIED CoSi2 LAYERS IN Si(100) BY MOLECULAR BEAM ALLOTAXY
Mantl, S. ; Bay, H. L. ; Michel, I. ; Mesters, S. ; Trinkaus, H.
Pub. info.: Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.447-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 320
25.

Conference Proceedings
Conference Proceedings
25. Coherent acoustic phonons in nanostructures investigated by asynchronous optical sampling (Invited Paper) [6393-17]
Dekorsy, T. ; Hudert, F. ; Cerna, R. ; Schafer, H. ; Janke, C. ; Bartels, A. ; Kohler, K. ; Braun, S. ; Wiemer, M. ; Mantl, S.
Pub. info.: Nanophotonics for Communication: Materials, Devices, and Systems III.  pp.63930H-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6393