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Conference Proceedings

1. Effect of the Oxidation of a Silicide Layer on Dopant Diffusion in the Underlying Silicon

Kappius, L. ; Tyagi, A. K. ; Breuer, U. ; Bay, H. L. ; Mantl, S.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.225-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	568

Conference Proceedings

2. Growth, Patterning and Microelectronic Applications of Epitaxial CobaltDisilicide

Mantl, S. ; Kappius, L. ; Antons, A. ; Loken, M. ; Klinkhammer, F. ; Dolle, M. ; Zhao, Q. T. ; Mesters, S. ; Buchal, Ch. ; Bay, H. L. ; Kabius, B. ; Trinkaus, H. ; Heinig, K. H.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.145-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

3. Patterning of Silicide Layers by Local Oxidation

Dolle, M. ; Mantl, S. ; Hacke, M. ; Mesters, St. ; Bay, H. L.

Pub. info.:	Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA. pp.549-, 1996. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	402

Conference Proceedings

4. GROWTH OF BURIED CoSi2 LAYERS IN Si(100) BY MOLECULAR BEAM ALLOTAXY

Mantl, S. ; Bay, H. L. ; Michel, I. ; Mesters, S. ; Trinkaus, H.

Pub. info.:	Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.447-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	320

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