1.

Conference Proceedings
Conference Proceedings
1. Development of surface micromachining technologies for microfluidics and bioMEMS
Okandan,M. ; Galambos,P. ; Mani,S.S. ; Jakubczak,J.F.
Pub. info.: Microfluidics and bioMEMS : 22-24 October 2001, San Francisco, USA.  pp.133-139,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4560
2.

Conference Proceedings
Conference Proceedings
2. Surface preparation for selective tungsten deposition on MEMS structures
Resnick,P.J. ; Mani,S.S.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  pp.181-188,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
3.

Conference Proceedings
Conference Proceedings
3. Parametric monitoring for the SUMMiT V surface-micromachining process
Oliver,A.D. ; Tanner,D.M. ; Mani,S.S. ; Swanson,S.E. ; Helgesen,K.S. ; Smith,N.F.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  pp.242-253,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
4.

Conference Proceedings
Conference Proceedings
4. High-efficiency optical MEMS by the integration of photonic lattices with surface MEMS
Fleming,J.G. ; Mani,S.S. ; Lin,S.-Y.
Pub. info.: MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA.  pp.183-188,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4561
5.

Conference Proceedings
Conference Proceedings
5. Optical performance of pivoting micromirrors
Spahn,O.Blum ; Garcia,E.J. ; Esch,V.C. ; Grossetete,G. ; Bitsie,F. ; Mani,S.S. ; Jakubczak,J.F.
Pub. info.: MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA.  pp.283-292,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4561
6.

Conference Proceedings
Conference Proceedings
6. W-coating for MEMS
Mani,S.S. ; Fleming,J.G. ; Sniegowski,J.J.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.150-157,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
7.

Conference Proceedings
Conference Proceedings
7. SiC Epitaxial Layer Growth in a Novel Multi-Wafer VPE Reactor
,A.A.Burk,Jr. ; O'Loughlin,M.J. ; Mani,S.S.
Pub. info.: Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997.  Part1  pp.83-88,  1998.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 264-268
8.

Conference Proceedings
Conference Proceedings
8. Failure analysis of tungsten-coated polysilicon micromachined microengines
Walraven,J.A. ; Mani,S.S. ; Fleming,J.G. ; Headley,T.J. ; Kotula,P.G. ; Pimentel,A.A. ; Rye,M.J. ; Tanner,D.M. ; Smith,N.F.
Pub. info.: MEMS Reliability for Critical Applications.  pp.49-57,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4180