1.

Conference Proceedings
Conference Proceedings
1. Parametric monitoring for the SUMMiT V surface-micromachining process
Oliver,A.D. ; Tanner,D.M. ; Mani,S.S. ; Swanson,S.E. ; Helgesen,K.S. ; Smith,N.F.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  pp.242-253,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
2.

Conference Proceedings
Conference Proceedings
2. Failure analysis of tungsten-coated polysilicon micromachined microengines
Walraven,J.A. ; Mani,S.S. ; Fleming,J.G. ; Headley,T.J. ; Kotula,P.G. ; Pimentel,A.A. ; Rye,M.J. ; Tanner,D.M. ; Smith,N.F.
Pub. info.: MEMS Reliability for Critical Applications.  pp.49-57,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4180