MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA. pp.183-188, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.150-157, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering