Malik, S. ; Maxwell, B. ; Gandolfi, A. ; Ornaghi, A. ; Whewell, A. ; Uhnak, K. ; Volpi, S. ; Driessche, V. Van ; Sarubbi, T. R. ; Hansen, S. G. ; Bowden, M. J.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.527-535, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Malik, S. ; Blakeney, A. J. ; Ferreira, L. ; Maxwell, B. ; Whewell, A. ; Sarubbi, T. R. ; Bowden, M. J. ; Driessche, V. Van ; Fujimori, T. ; Tan, S. ; Aoai, T. ; Uenishi, K. ; Kawabe, Y. ; Kokubo, T.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.388-401, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering