Scalese, S. ; Privitera, V. ; Italia, M. ; Magna, A.La ; Alippi, P. ; Renna, L.
Pub. info.:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.345-350, 2004. Warrendale, Pa.. Materials Research Society
Alippi, P. ; Magna, A.La ; Scalese, S. ; Privitera, V.
Pub. info.:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.281-286, 2004. Warrendale, Pa.. Materials Research Society