1.

Conference Proceedings
Conference Proceedings
1. Structural formation of the lead zirconate titanate formed in pulsed-laser ablation deposition
Ichiki,M. ; Zhang,L. ; Wang,Z. ; Morikawa,Y. ; Tanaka,M. ; Maeda,R.
Pub. info.: Complex mediums II : beyond linear isotropic dielectrics, 30 July-1 August, 2001, San Diego, USA.  pp.387-394,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4467
2.

Conference Proceedings
Conference Proceedings
2. "Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and metal powder injection"
Murakoshi,Y. ; Shimizu,T. ; Takagi,H. ; Li,Y. ; Uchino,K. ; Yokoi,T. ; Maeda,R.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France.  pp.502-509,  2001.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4408
3.

Conference Proceedings
Conference Proceedings
3. Development of microelectromechanical varactors
Lee,C.-H. ; Tsai,S.-H. ; Lin,C.-H. ; Maeda,R. ; Tsaur,J.-J. ; Fang,K.-J. ; Lu,J.-M. ; Lee,C. ; Fang,W.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France.  pp.486-493,  2001.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4408
4.

Conference Proceedings
Conference Proceedings
4. Microscanner actuated by double PZT thin film
Zhang,L. ; Lin,W.-M. ; Maeda,R.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France.  pp.528-534,  2001.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4408
5.

Conference Proceedings
Conference Proceedings
5. Preparation and characterization of excimer-laser-ablation-derived lead zirconate titanate thin films for microactuators
Wang,Z.-J. ; Maeda,R. ; Hokawa,H.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France.  pp.494-501,  2001.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4408
6.

Conference Proceedings
Conference Proceedings
6. Micropump based on temperature dependence of liquid viscosity
Masumoto,S. ; Klein,A. ; Schroth,A. ; Maeda,R.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.364-371,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
7.

Conference Proceedings
Conference Proceedings
7. Characterization and application of jet-printed thin PZT layers for actuation of MEMS
Schroth,A. ; Ichiki,M. ; Maeda,R. ; Akedo,J.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.380-387,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
8.

Conference Proceedings
Conference Proceedings
8. Deposition of PZT thin films by pulsed laser ablation for MEMS application
Maeda,R. ; Kikuchi,K.M. ; Schroth,A. ; Umezawa,A. ; Masumoto,S.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.372-379,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
9.

Conference Proceedings
Conference Proceedings
9. Microfabrication technique for thick structure of metals and PZT
Shimizu,T. ; Murakoshi,Y. ; Wang,Z. ; Maeda,R. ; Sano,T.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.472-477,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
10.

Conference Proceedings
Conference Proceedings
10. "Ferroelectric Pb(Zr0.53, Ti0.47)O3 thin films for smart MEMS"
Maeda,R. ; Wang,Z. ; Chu,J. ; Lin,W.
Pub. info.: Smart structures and devices : 13-15 December 2000, Melbourne, Australia.  pp.40-47,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4235
11.

Conference Proceedings
Conference Proceedings
11. Preparation and characterization of sol-gel-derived PZT thin films for microactuators
Wang,Z. ; Maeda,R. ; Kikuchi,K.M.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.948-955,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
12.

Conference Proceedings
Conference Proceedings
12. Si-based print circuit board fabricated by Si deep etching and metal powder injection molding
Maeda,R. ; Murakoshi,Y. ; Shimizu,T. ; Li,Y. ; Takizawa,H.
Pub. info.: Smart structures and devices : 13-15 December 2000, Melbourne, Australia.  pp.209-216,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4235
13.

Conference Proceedings
Conference Proceedings
13. Two-dimensional microscanner actuated by PZT thin film
Lin,W.-M. ; Schroth,A. ; Matsumoto,S. ; Lee,C. ; Maeda,R.
Pub. info.: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.133-140,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3892
14.

Conference Proceedings
Conference Proceedings
14. Si/Si Interface Bonded at Room Temperature by Ar Beam Surface Activation
Takagi,H. ; Maeda,R. ; Hosoda,N. ; Suga,T.
Pub. info.: Intergranular and interphase boundaries in materials : iib98 : proceedings of the 9th International Conference on Intergranular and Interphase Boundaries in Materials (iib98), held in Prague, Czech Republic, July, 1998.  pp.341-344,  1999.  Zurich-Uetikon, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 294-296
15.

Conference Proceedings
Conference Proceedings
15. Transient measurement of surface deflection for beams and membranes in micromechanical devices
Klein,A. ; Schroth,A. ; Gerlach,G. ; Maeda,R.
Pub. info.: Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 16-19 June, 1998, Ancona, Italy.  pp.618-623,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3411
16.

Conference Proceedings
Conference Proceedings
16. Application of jet-printed PZT layers for actuation of small beams,membranes,and a 2D scanning actuator
Schroth,A. ; Ichiki,M. ; Maeda,R. ; Akedo,J. ; Matsumoto,S.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.172-180,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
17.

Conference Proceedings
Conference Proceedings
17. New home for NEAT on the 1.2m/B37 at AMOS
Talent,D.L. ; Maeda,R. ; Walton,S. ; Sydney,P.F. ; Hsu,Y. ; Gameron,B. ; Kervin,P.W. ; Helin,E.F. ; Pravdo,S.H. ; Lawrence,K. ; Rabinowitz,D.
Pub. info.: Imaging Technology and Telescopes.  pp.225-236,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4091