1.

Conference Proceedings
Conference Proceedings
1. Two-dimensional microscanner actuated by PZT thin film
Lin,W.-M. ; Schroth,A. ; Matsumoto,S. ; Lee,C. ; Maeda,R.
Pub. info.: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.133-140,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3892
2.

Conference Proceedings
Conference Proceedings
2. Application of jet-printed PZT layers for actuation of small beams,membranes,and a 2D scanning actuator
Schroth,A. ; Ichiki,M. ; Maeda,R. ; Akedo,J. ; Matsumoto,S.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.172-180,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242