1.

Conference Proceedings
Conference Proceedings
1. Micropump based on temperature dependence of liquid viscosity
Masumoto,S. ; Klein,A. ; Schroth,A. ; Maeda,R.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.364-371,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
2.

Conference Proceedings
Conference Proceedings
2. Transient measurement of surface deflection for beams and membranes in micromechanical devices
Klein,A. ; Schroth,A. ; Gerlach,G. ; Maeda,R.
Pub. info.: Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 16-19 June, 1998, Ancona, Italy.  pp.618-623,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3411