1.

Conference Proceedings
Conference Proceedings
1. Development of a Long Life NiMH Secondary Battery
Chikano, Y. ; Kimoto, M. ; Maeda, R. ; Nogami, M. ; Nishio, K. ; Saito, T. ; Hakahori, S. ; Murakami, S. ; Furukawa, N.
Pub. info.: Proceedings of the Symposium on Hydrogen and Metal Hydride Batteries.  pp.403-414,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-27
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Conference Proceedings
Conference Proceedings
2. Optical switch array based on microforming process
Hashiura, Y. ; Ikehara, T. ; Kitajima, A. ; Goto, H. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.414-421,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592
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Conference Proceedings
Conference Proceedings
3. Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and vacuum metal casting
Murakoshi, Y. ; Hanada, K. ; Li, Y. ; Uchino, K. ; Suzuki, T. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.473-480,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592
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Conference Proceedings
Conference Proceedings
4. Room-Temperature Wafer Bonding Using Ar Beam Surface Activation
Takagi, H. ; Maeda, R. ; Hosoda, N. ; Chung, T.R. ; Suga, T.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.265-274,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-35
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Conference Proceedings
Conference Proceedings
5. Microneedle array and insertion guide array for safe use of biomedical applications
Khumpuang, S. ; Maeda, R. ; Sugiyama, S.
Pub. info.: BioMEMS and nanotechnology : 10-12 December 2003, Perth, Australia.  pp.231-238,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5275
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Conference Proceedings
Conference Proceedings
6. High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine
Shan, X.C. ; Murakoshi, Y. ; Wang, Z. ; Lu, H.J. ; Jin, Y. ; Ikehara, T. ; Maeda, R. ; Wong, C.K.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.428-433,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
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Conference Proceedings
Conference Proceedings
7. Formation and its characteristics of PLZT layered film structure for transducers
Ichiki, M. ; Kobayashi, T. ; Morikawa, Y. ; Mabune, Y. ; Nakada, T. ; Nonaka, K. ; Endo, C. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.400-407,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
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Conference Proceedings
Conference Proceedings
8. Preparation of PZT films derived by hybrid processing for MEMS application
Yan, L. ; Wang, Z.J.M. ; Kokawa, H. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.414-421,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
9.

Conference Proceedings
Conference Proceedings
9. Silicon Wafer Bonding at Room Temperature by Ar Beam Surface Activation in Vacuum
Takagi, H. ; Maeda, R. ; Chung, T.R. ; Suga, T.
Pub. info.: Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications.  pp.393-400,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-36
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Conference Proceedings
Conference Proceedings
10. An Easy Fabrication Technique for Micro Paraffin Actuator and Application to Microvalve
Kobayashi, T. ; Matsuoka, S. ; Ueno, A. ; Maeda, R.
Pub. info.: Microfabricated systems and MEMS VII : proceedings of the international symposium.  pp.330-335,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-09
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Conference Proceedings
Conference Proceedings
11. Smart Piezoelectric PZT Microcantilevers with Inherent Sensing and Actuating Abilities for AFM and LFM
Lee, C. ; Itoh, T. ; Chu, J. ; Ohashi, T. ; Maeda, R. ; Schroth, A. ; Suga, T.
Pub. info.: Materials for smart systems II : sympsoium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.35-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 459
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Conference Proceedings
Conference Proceedings
12. Development of Micromirror Using Piezoelectric Excited and Actuated Structures
Maeda, R. ; Lee, C. ; Schroth, A.
Pub. info.: Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A..  pp.233-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 444
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Conference Proceedings
Conference Proceedings
13. Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation
Zhang, L. ; Ichiki, M. ; Wang, Z.-J. ; Maeda, R.
Pub. info.: Smart materials II : 16-18 December 2002, Melbourne, Australia.  pp.30-37,  2002.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4934
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Conference Proceedings
Conference Proceedings
14. In situ deposition of epitaxial PZT films by pulsed laser deposition
Wang, Z. J. ; Yan, L. J. ; Kokawa, H. ; Maeda, R.
Pub. info.: Smart materials III : 13-15 December 2004, Sydney, Australia.  pp.89-96,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5648
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Conference Proceedings
Conference Proceedings
15. Deposition of Pb(Zr XTi1-X )03 thin films by pulsed laser ablation for MEMS application
Wang, Z.-J. ; Maeda, R. ; Kokawa, H.
Pub. info.: Smart materials II : 16-18 December 2002, Melbourne, Australia.  pp.356-363,  2002.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4934
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Conference Proceedings
Conference Proceedings
16. Biomimetic actuator based on dielectric polymer
Choi, H. ; Ryew, S. ; Jung, K. ; Jeon, J.W. ; Kim, H. ; Nam, J.-D. ; Takanishi, A. ; Maeda, R. ; Kaneko, K. ; Tanie, K.
Pub. info.: Smart structures and materials 2002 : electroactive polymer actuators and devices (EAPAD) : 18-21 March 2002, San Diego, USA.  pp.138-149,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4695
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Conference Proceedings
Conference Proceedings
17. Micro Powder Injection Molding of Metal Microstructures
Loh, N.H. ; Tor, S.B. ; Tay, B.Y. ; Murakoshi, Y. ; Maeda, R.
Pub. info.: THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain.  pp.4289-4294,  2003.  Zuerich-Uetikon, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 426-432
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Conference Proceedings
Conference Proceedings
18. Sol-gel deposition of PZT thick film on Pt/Ti/SOI substrate and application to 2D micro scanning mirror
Kobayashi, T. ; Tsaur, J. ; Ichiki, M. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.524-531,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
19.

Conference Proceedings
Conference Proceedings
19. Micro hot embossing for high-aspect-ratio structure with materials flow enhancement by polymer sheet
Murakoshi, Y. ; Shan, X.-C. ; Sano, T. ; Takahashi, M. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.532-539,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
20.

Conference Proceedings
Conference Proceedings
20. Recent development of micropore optics using MEMS technologies [6266-48]
Ezoe, Y. ; Koshiishi, M. ; Mita, M. ; Mitsuda, K. ; Ishisaki, T. ; Hoshino, A. ; Yang, Z. ; Takano, T. ; Mekaru, H. ; Maeda, R.
Pub. info.: Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray.  pp.62661B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6266
21.

Conference Proceedings
Conference Proceedings
21. Development of a micro hot embossing process for fabricating micro-optical devices (Invited Paper)
Shan, X.C. ; Maeda, R. ; Murakoshi, Y.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.67-75,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936
22.

Conference Proceedings
Conference Proceedings
22. Resonant-typed microscanners fabricated by hybrid PZT deposition process on SOI wafers
Tsaur, J.-J. ; Wang, Z.J. ; Zhang, L. ; Ichiki, M. ; Maeda, R. ; Suga, T.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.215-224,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936
23.

Conference Proceedings
Conference Proceedings
23. A world-to-chip socket for microfluidic prototype development
Yang, Z. ; Maeda, R.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.98-104,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936
24.

Conference Proceedings
Conference Proceedings
24. Microfabrication of thick and bulk PZT materials for piezoelectric actuator
Lee, S.H. ; Maeda, R. ; Esashi, M.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.365-372,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936
25.

Conference Proceedings
Conference Proceedings
25. Optimization of Au mask fabrication processes for LIGA applications
Shan, X.C. ; Maeda, R. ; Ikehara, T. ; Mekaru, H. ; Hattori, T.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.356-364,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936
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Conference Proceedings
Conference Proceedings
26. Microsensors and actuator arrays based on Pb(Zr,Ti) O3 thin film for AFM data storage
Chu, J. ; Lu, J. ; Wu, Y. ; Huang, W. ; Maeda, R. ; Itoh, T. ; Suga, T.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.379-383,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
27.

Conference Proceedings
Conference Proceedings
27. Development of a MEMS-based micro combustor for a micro gas turbine engine
Shan, X. C. ; Jin, Y. F. ; Wang, Z. F. ; Wang, C. K. ; Murakoshi, Y. ; Maeda, R.
Pub. info.: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II.  pp.337-344,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5650