1.

Conference Proceedings
Conference Proceedings
1. Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and vacuum metal casting
Murakoshi, Y. ; Hanada, K. ; Li, Y. ; Uchino, K. ; Suzuki, T. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.473-480,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592
2.

Conference Proceedings
Conference Proceedings
2. High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine
Shan, X.C. ; Murakoshi, Y. ; Wang, Z. ; Lu, H.J. ; Jin, Y. ; Ikehara, T. ; Maeda, R. ; Wong, C.K.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.428-433,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
3.

Conference Proceedings
Conference Proceedings
3. Micro Powder Injection Molding of Metal Microstructures
Loh, N.H. ; Tor, S.B. ; Tay, B.Y. ; Murakoshi, Y. ; Maeda, R.
Pub. info.: THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain.  pp.4289-4294,  2003.  Zuerich-Uetikon, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 426-432
4.

Conference Proceedings
Conference Proceedings
4. Micro hot embossing for high-aspect-ratio structure with materials flow enhancement by polymer sheet
Murakoshi, Y. ; Shan, X.-C. ; Sano, T. ; Takahashi, M. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.532-539,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
5.

Conference Proceedings
Conference Proceedings
5. Development of a micro hot embossing process for fabricating micro-optical devices (Invited Paper)
Shan, X.C. ; Maeda, R. ; Murakoshi, Y.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.67-75,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936
6.

Conference Proceedings
Conference Proceedings
6. Development of a MEMS-based micro combustor for a micro gas turbine engine
Shan, X. C. ; Jin, Y. F. ; Wang, Z. F. ; Wang, C. K. ; Murakoshi, Y. ; Maeda, R.
Pub. info.: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II.  pp.337-344,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5650