Hashiura, Y. ; Ikehara, T. ; Kitajima, A. ; Goto, H. ; Maeda, R.
Pub. info.:
Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.414-421, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Shan, X.C. ; Murakoshi, Y. ; Wang, Z. ; Lu, H.J. ; Jin, Y. ; Ikehara, T. ; Maeda, R. ; Wong, C.K.
Pub. info.:
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia. pp.428-433, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Shan, X.C. ; Maeda, R. ; Ikehara, T. ; Mekaru, H. ; Hattori, T.
Pub. info.:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems. pp.356-364, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
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