1.

Conference Proceedings
Conference Proceedings
1. Formation and its characteristics of PLZT layered film structure for transducers
Ichiki, M. ; Kobayashi, T. ; Morikawa, Y. ; Mabune, Y. ; Nakada, T. ; Nonaka, K. ; Endo, C. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.400-407,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
2.

Conference Proceedings
Conference Proceedings
2. Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation
Zhang, L. ; Ichiki, M. ; Wang, Z.-J. ; Maeda, R.
Pub. info.: Smart materials II : 16-18 December 2002, Melbourne, Australia.  pp.30-37,  2002.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4934
3.

Conference Proceedings
Conference Proceedings
3. Sol-gel deposition of PZT thick film on Pt/Ti/SOI substrate and application to 2D micro scanning mirror
Kobayashi, T. ; Tsaur, J. ; Ichiki, M. ; Maeda, R.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.524-531,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
4.

Conference Proceedings
Conference Proceedings
4. Resonant-typed microscanners fabricated by hybrid PZT deposition process on SOI wafers
Tsaur, J.-J. ; Wang, Z.J. ; Zhang, L. ; Ichiki, M. ; Maeda, R. ; Suga, T.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.215-224,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936