1.

Conference Proceedings
Conference Proceedings
1. Inductively-Coupled Plasma Deposition of Low Temperature Silicon Dioxide and Silicon Nitride Films for III-V Applications
Mackenzie, K.D. ; Lee, J.W ; Johnson, D.J.
Pub. info.: Proceedings of the State-of-the-Art Program on Compound Semiconductors (SOTAPOCs XXX).  pp.1-12,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-4
2.

Conference Proceedings
Conference Proceedings
2. Effects of N2 or Ar Plasma Exposure on GaAs/AlGaAs Heterojunction Bipolar Transistors *
Hsu, C.H. ; Chen, C.C. ; Ren, B.Luo.F. ; Pearton, S.J. ; Abernathy, C.R. ; Lee, J.W. ; Mackenzie, K.D. ; Sasserath, J.
Pub. info.: III-Nitride Based Semiconductor Electronics and Optical Devices and thirty-fourth State-of-the-Art-Program on Compound Semiconductors (SOTAPOCS XXXIV) : proceedings of the International Symposia.  pp.241-249,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-1
3.

Conference Proceedings
Conference Proceedings
3. Development of low temperature silicon nitride and silicon dioxide films by inductively-coupled plasma chemical vapor deposition
Lee, J.W. ; Mackenzie, K.D. ; Johnson, D. ; Pearton, S.J. ; Ren, F. ; Sasserath, J.N.
Pub. info.: Compound semiconductor surface passivation and novel device processing : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.69-79,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 573
4.

Conference Proceedings
Conference Proceedings
4. DEUTERON MAGNETIC RESONANCE IN a-Si AND a-SiGe PRODUCED FROM FLOURIDES
Bork, V.P. ; Fedders, P.A. ; Norberg, R.E. ; Leopold, D.J. ; Mackenzie, K.D. ; Paul, W.
Pub. info.: Materials issues in amorphous-semiconductor technology : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.307-312,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 70
5.

Conference Proceedings
Conference Proceedings
5. Stress Control of Si-Based PECVD Dielectrics
Mackenzie, K.D. ; Johnson, D.J. ; DeVre, M.W. ; Westerman, R.J. ; Reelfs, B.H.
Pub. info.: Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium.  pp.148-159,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-01