1.

Conference Proceedings
Conference Proceedings
1. Inductively-Coupled Plasma Deposition of Low Temperature Silicon Dioxide and Silicon Nitride Films for III-V Applications
Mackenzie, K.D. ; Lee, J.W ; Johnson, D.J.
Pub. info.: Proceedings of the State-of-the-Art Program on Compound Semiconductors (SOTAPOCs XXX).  pp.1-12,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-4
2.

Conference Proceedings
Conference Proceedings
2. Stress Control of Si-Based PECVD Dielectrics
Mackenzie, K.D. ; Johnson, D.J. ; DeVre, M.W. ; Westerman, R.J. ; Reelfs, B.H.
Pub. info.: Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium.  pp.148-159,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-01