Three-Dimensional Micro-Actuator Fabrication by Aluminum Anodizing, Laser Irradiation, and Electrodepopsition

Three-Dimensional Micro-Actuator Fabrication by Aluminum Anodizing, Laser Irradiation, and Electrodepopsition

Author(s):

Publication title:

Light Alloys 3

Title of ser.:

ECS transactions

Ser. no.:

11(15)

Pub. Year:

2008

Page(from):

29

Page(to):

35

Pages:

7

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781605601885 [1605601888]

Language:

English

Call no.:

E23400/11-15 [15]

Type:

Conference Proceedings

Details

TDL ID:	ZA00013275
Series ID:	PA00000034
Conf. info. (Name):	ECS Meeting
Conf. info. (Number):	212th
Conf. info. (Venue):	Washington, DC, USA
Conf. info. (Date):	2007.10.07-2007.10.12
Note for article:	212th ECS Meeting, October 7 - October 12, 2007, Washington, DC

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