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3D surface defect analysis and evaluation

Author(s):
  • B. Yang ( GE Research and Development Center Co., Ltd, China )
  • M. Jia ( GE Research and Development Center Co., Ltd, China )
  • G. J. Song ( GE Research and Development Center Co., Ltd, China )
  • L. Tao ( GE Research and Development Center Co., Ltd, China )
  • K. G. Harding ( GE Global Research, United States )
Publication title:
Two- and three-dimensional methods for inspection and metrology VI : 10-11 August 2008, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7066
Pub. Year:
2008
Page(from):
706608-1
Page(to):
706608-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819472861 [0819472867]
Language:
English
Call no.:
P63600/7066
Type:
Conference Proceedings

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