1.

Conference Proceedings
Conference Proceedings
1. Electrical Passivation of the (100)Ge Surface by Its Thermal Oxide
F. Bellenger ; M. Houssa ; A. Delabie ; T. Conard ; M. Caymax
Pub. info.: Physics and technology of high-k gate dielectrics 5.  pp.451-459,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(4)
2.

Conference Proceedings
Conference Proceedings
2. Atomic Layer Deposition of Hafnium Based Gate Dielectric Layers for CMOS Applications
A. Delabie ; L. Nyns ; F. Bellenger ; M. Caymax ; T. Conard
Pub. info.: Atomic layer deposition applications 3.  pp.227-241,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(7)
3.

Conference Proceedings
Conference Proceedings
3. Screening of High-κ Layers in MIS and MIM Capacitors Using Aqueous Chemical Solution Deposition
S. Van Elshocht ; A. Hardy ; C. Adelmann ; M. Caymax ; T. Conard
Pub. info.: Physics and technology of high-k gate dielectrics 5.  pp.299-310,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(4)
4.

Conference Proceedings
Conference Proceedings
4. Growth Studies and Reaction Mechanism of the Atomic Layer Deposition of Hafnium Oxide
A. Debbie ; M. Caymax ; S. Brijs ; D. Brunco ; T. Conard ; E. Sleeckx ; L. Ragnarsson ; S. Van Elshocht ; S. De Gendt ; M. Heyns
Pub. info.: Physics and technology of high-k gate dielectrics III.  pp.433-446,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(5)
5.

Conference Proceedings
Conference Proceedings
5. Characterization of Atomic-Beam Deposited GeO₁₋xNx/HfO₂ Stacks on Ge
M. Houssa ; T. Conard ; J. Van Steenbergen ; G. Mavrou ; Y. Panayiotatos ; T. Dimaulas ; M. Meuris ; M. Caymax ; M. Heyns ; G. Nicholas
Pub. info.: Physics and technology of high-k gate dielectrics III.  pp.9-16,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(5)