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Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.425-430, 2003. Pennington, N.J.. Electrochemical Society
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Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.207-212, 2001. Pennington, N.J.. Electrochemical Society