1.

Conference Proceedings
Conference Proceedings
1. Metropole-3D: a rigorous 3D topography simulator
Li,X. ; Lucas,K.D. ; Swecker,A.L. ; Strojwas,A.J.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.717-728,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings
Conference Proceedings
2. Efficient workstation-based 3D model for optical alignment simulation
Lucas,K.D. ; Yuan,C.-M. ; Strojwas,A.J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.436-447,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725