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Surface-micromachined tunable resonant cavity LED using wafer bonding

Author(s):
Christenson,G.L. ( Cornell Univ. )
Tran,A.T.T.D.
Zhu,Z.H.
Lo,Y.H.
Hong,M.
Mannaerts,J.P.
Bhat,R.J.
2 more
Publication title:
Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3008
Pub. Year:
1997
Page(from):
35
Page(to):
42
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424198 [0819424196]
Language:
English
Call no.:
P63600/3008
Type:
Conference Proceedings

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