1.

Conference Proceedings

Conference Proceedings
Liu,H.-Y. ; Karklin,L. ; Wang,Y.-T. ; Pati,Y.C.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.2-14,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings

Conference Proceedings
Liu,H.-Y. ; Karklin,L. ; Wang,Y.-T. ; Pati,Y.C.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.328-337,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236