1.

Conference Proceedings
Conference Proceedings
1. PHOTOLUMINESCENCE STUDY OF HYDROGEN-RELATED DEFECTS IN SILICON
Henry, A. ; Monemar, B. ; Lindstrom, J. L. ; Zhang, Y. ; Corbett, J. W.
Pub. info.: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.261-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 324
2.

Conference Proceedings
Conference Proceedings
2. Characterization of Defects Created in Silicon Due to Etching in Low-Pressure Plasmas Containing Fluorine and Oxygen
Buyanova, I. A. ; Henry, A. ; Monemar, B. ; Lindstrom, J. L. ; Lamprecht, A. ; Svensson, B. G. ; Oehrlein, G. S.
Pub. info.: Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.599-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 396