1.

Conference Proceedings
Conference Proceedings
1. Resolution enhancement in optical lithography with chromium wire-grid polarization mask
Yu, G. ; Lin, W. ; Xing, T. ; Yao, H.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.122-129,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
2.

Conference Proceedings
Conference Proceedings
2. Resolution enhancement in optical lithography using polarized film mask
Yu, G. ; Lin, W. ; Chen, X. ; Xing, T. ; Yao, H.
Pub. info.: Fifth International Conference on Thin Film Physics and Applications : 31 May-2 June, 2004, Shanghai, China.  pp.567-570,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5774