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On-machine measurement with LTP (long trace profiler)

Author(s):
Moriyasu, S. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
Takacs, P.Z. ( Brookhaven National Lab. (USA) )
Kato, J. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
Lin, W. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
Yamagata, Y. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
Ohmori, H. ( RIKEN-The Institute of Physical and Chemical Research (Japan) )
1 more
Publication title:
Optical manufacturing and testing V : 3-5 August 2003, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5180
Pub. Year:
2003
Page(from):
385
Page(to):
392
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819450531 [0819450537]
Language:
English
Call no.:
P63600/5180
Type:
Conference Proceedings

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