Schulz-Ruthenberg, M. ; Ihlemann, J. ; Marowsky, G. ; Nejadmalayeri, A.H. ; Ng, M.L. ; Li, J. ; Herman, P.R.
Pub. info.:
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany. pp.113-117, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering