1.

Conference Proceedings

Conference Proceedings
van de Kerkhof, M. ; de Boeij, W. ; Demarteau, M. ; Geh, B. ; Leunissen, L. H. A. ; Martin, P. ; Cangemi, M.
Pub. info.: Optical Microlithography XIX.  pp.615444-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
2.

Conference Proceedings

Conference Proceedings
Geh, B. ; Flagello, D. G. ; Pregler, C. ; Martin, P. M. ; Leunissen, L. H. A. ; Hansen, S. ; de Boeij, W.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599210-599210,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992