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Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.449-458, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Advances in Resist Technology and Processing XIX. Part Two pp.1119-1125, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering