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Conference Proceedings

1. Chemical Mechanical Planarization of Ruthenium for Capacitor Bottom Electrode in DRAM Technology

Lee, S-H. ; Kang, Y-J ; Park, J-G. ; Lee, S-I.

Pub. info.:	Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium. pp.304-310, 2003. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-13

Conference Proceedings

2. Analytical Methodology and Design of Advanced Test Structure for the Mechanical Characteristics of Microactuator Materials

Lee, S-H. ; Park, B. W. ; Pak, Y. ; Kwon, D.

Pub. info.:	Materials reliability in microelectronics IX : symposium held April 6-8, 1999, San Francisco, California, U.S.A.. pp.237-, 1999. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	563

Conference Proceedings

3. A Novel Method of Measuring Viscosity and Tracing the Morphology Evolution using Single Screw Extruder: The Screw Rheometer

Kim, M-H. ; Oh, Y-T. ; Lee, S-H. ; Yang, Y-C. ; Lee, H-Y.

Pub. info.:	ANTEC 2003, annual technical conference, May 4-8, Nashville, Tennessee. pp.103-109, 2003. Brookfield Center, Conn.. Society of Plastics Engineers
Title of ser.:	Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:	61

Conference Proceedings

4. Electrical Characterization of Slurry Particles and Their Interactions With Wafer Surfaces

Jeong, H-D. ; Kim, H-G. ; Lee, S-H. ; Moon, D-K. ; Park, J-G.

Pub. info.:	Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.173-180, 2000. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	566