Surface smoothing of polycrystalline Si waveguides with gas-cluster ion beams
- Author(s):
Toyoda, N. Lee, K. K. Luan, H-C. Lim, D. R. Agarwal, A. M. Wada, K. Kimerling, L. C. Allen, L. P. Fenner, D. B. Kirkpatrick A. R. - Publication title:
- Thin films for optical waveguide devices and materials for optical limiting : symposium held November 30-December 3, 1999, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 597
- Pub. Year:
- 2000
- Page(from):
- 51
- Pub. info.:
- Warrendale, PA: MRS-Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995055 [1558995056]
- Language:
- English
- Call no.:
- M23500/597
- Type:
- Conference Proceedings
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