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Surface smoothing of polycrystalline Si waveguides with gas-cluster ion beams

Author(s):
Toyoda, N.
Lee, K. K.
Luan, H-C.
Lim, D. R.
Agarwal, A. M.
Wada, K.
Kimerling, L. C.
Allen, L. P.
Fenner, D. B.
Kirkpatrick A. R.
5 more
Publication title:
Thin films for optical waveguide devices and materials for optical limiting : symposium held November 30-December 3, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
597
Pub. Year:
2000
Page(from):
51
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995055 [1558995056]
Language:
English
Call no.:
M23500/597
Type:
Conference Proceedings

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