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High Microwave Power ECR Etching of III-V Semiconductors in CH4/H2/Ar

Author(s):
Lee, J.W.
Pearton, S.J.
Lambers, E.S.
Mileham, J.R.
Abernathy, C.R.
Hobson, W.S.
Ren, F.
Shul, R.J.
3 more
Publication title:
Proceedings of the Twenty-fourth State-of-the-Art Program on Compound Semiconductors
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-2
Pub. Year:
1996
Page(from):
203
Page(to):
213
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771528 [1566771528]
Language:
English
Call no.:
E23400/962066
Type:
Conference Proceedings

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