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Conference Proceedings
Yoon, B.U. ; Jeong, I.K ; Kim, J.Y. ; Lee, J.W. ; Hah, S.R. ; Moon, J.T. ; Lee, S.I.
Pub. info.:
Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium . pp.616-624, 1999. Pennington, N. J.. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-37
2.
Conference Proceedings
Oh, S.K. ; Kim, J.Y. ; Lee, J.W. ; Kim, D. ; Kim, J. ; Lee, G. ; Jung, J.C. ; Bok, C.K. ; Shin, K.S.
Pub. info.:
Advances in Resist Technology and Processing XXI . pp.625-632, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5376