The Effect of N2 Plasma Damage on DC and RF Characteristics of HEMTs
- Author(s):
Luo, B. Trivedi, V.P. Ren, F. Hsu, C.H. Pearton, S.J. Abernathy, C.R. Cao, X. Wu, C.S. Hoppe, M. Sasserath, J. Lee, J.W. - Publication title:
- High Speed Compound Semiconductor Devices for Wireless Applications and State-of-the-Art Program on Compound Semiconductors (XXXIII) : proceedings of the International Symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2000-18
- Pub. Year:
- 2000
- Page(from):
- 158
- Page(to):
- 170
- Pages:
- 13
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772853 [1566772850]
- Language:
- English
- Call no.:
- E23400/200018
- Type:
- Conference Proceedings
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