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Plasma-Induced-Damage of GaN

Author(s):
Shul, R.J.
Zolper, J.C.
Hagerott Crawford, M.
Hickamn, R.J.
Briggs, R.D.
Pearton, S.J.
Lee, J.W.
Karlicek, R.F., Jr.
Tran, C.
Schurman, M.
Constantine, C.
Barratt, C.
7 more
Publication title:
Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-15
Pub. Year:
1996
Page(from):
232
Page(to):
243
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771658 [156677165X]
Language:
English
Call no.:
E23400/963435
Type:
Conference Proceedings

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