1.

Conference Proceedings
Conference Proceedings
1. Bonding technologies ofr silicon scanning mirror having vertical comb fingers
Lee, J.-H. ; Ko, Y.-C. ; Choi, B.-S. ; Kim, J.-M. ; Jeon, D.-Y.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.428-435,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592
2.

Conference Proceedings
Conference Proceedings
2. Laser TV for home theater
Lee, J.-H. ; Mun, Y.-K. ; Do, S.-W. ; Ko, Y.-C. ; Kong, D.-H. ; Choi, B.-S. ; Kim, J.-M. ; Hong, C.-W. ; Jeon, D.-Y.
Pub. info.: Projection Displays VIII.  pp.138-146,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4657
3.

Conference Proceedings
Conference Proceedings
3. Modeling and correction of global CD uniformity caused by fogging and loading effects in 90-nm-node CAR process
Park, D.-I. ; Park, E.-S. ; Lee, J.-H. ; Jeong, W.-G. ; Seo, S.-K. ; Kwon, H.-J. ; Kim, J.-M. ; Jung, S.-M. ; Choi, S.-S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.78-85,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
4.

Conference Proceedings
Conference Proceedings
4. Comparative evaluation of mask production CAR development processes with stepwise defect inspection
Jeong, W.-G. ; Lee, J.-K. ; Park, D.I. ; Park, E.-S. ; Lee, J.-H. ; Seo, S.-K. ; Lee, D.-H. ; Kim, J.-M. ; Choi, S.S. ; Jeong, S.H.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.626-633,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
5.

Conference Proceedings
Conference Proceedings
5. 90-nm-node CD uniformity improvement using a controlled gradient temperature CAR PEB process
Park, D.-I. ; Seo, S.-K. ; Park, E.-S. ; Lee, J.-H. ; Jeong, W.-G. ; Kim, J.-M. ; Choi, S.-S. ; Jeong, S.-H.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.634-640,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
6.

Conference Proceedings
Conference Proceedings
6. A study of post-exposure baking effect for CAR process in photomask fabrication
Park, D.-I. ; Seo, S.-K. ; Jeong, W.-G. ; Park, E.-S. ; Lee, J.-H. ; Kwon, H.-J. ; Kim, J.-M. ; Jung, S.-M. ; Choi, S.-S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.190-196,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130