Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part2 pp.622-631, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California. pp.258-264, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California. pp.136-141, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California. pp.62-67, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California. pp.251-257, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering