1.

Conference Proceedings
Conference Proceedings
1. Formation and Characteristics of CoSi2 Layers Synthesized by MEVVA Implantation
Wong, S. P. ; Peng, Qicai ; Cheung, W. Y. ; Guo, W. S. ; Xu, J. B. ; Wilson, I. H. ; Hark, S. K. ; Morton, R. ; Lau, S. S.
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.307-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
2.

Conference Proceedings
Conference Proceedings
2. The Formation of TiN-Encapsulated Silver Films by Nitridation of Silver-Refractory Metal Alloys in NH3
Adams, Daniel ; Alford, T. L. ; Laursen, T. ; Deng, F. ; Morton, R. ; Lau, S. S.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.337-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
3.

Conference Proceedings
Conference Proceedings
3. Encapsulation of Silver Via Nitridation of Ag/Ti Bilayer Structures
Zou, Y. L. ; Alford, T. L. ; Adams, D. ; Laursen, T. ; Tu, K.-N. ; Morton, R. ; Lau, S. S.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.355-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
4.

Conference Proceedings
Conference Proceedings
4. Lattice damage in ion-implanted compound semiconductors and its effect on electrical activation
Haynes, T. E. ; Morton, R. ; Lau, S. S.
Pub. info.: III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A..  pp.311-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 300
5.

Conference Proceedings
Conference Proceedings
5. Formation and Characteristics of CoSi2 Layers Synthesized by MEVVA Implantation
Wong, S. P. ; Peng, Qical ; Cheung, W. Y. ; Guo, W. S. ; Xu, J. B. ; Wilson, I. H. ; Hark, S. K. ; Morton, R. ; Lau, S. S.
Pub. info.: Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.239-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 439
6.

Conference Proceedings
Conference Proceedings
6. Cobalt and Titanium Metallization of SiGeC for Shallow Contacts
Bair, A. E. ; Alford, T. L. ; Atzmon, Z. ; Marcus, S. D. ; Doller, D. C. ; Morton, R. ; Lau, S. S. ; Mayer, J. W.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.529-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427