1.

Conference Proceedings
Conference Proceedings
1. The Formation of TiN-Encapsulated Silver Films by Nitridation of Silver-Refractory Metal Alloys in NH3
Adams, Daniel ; Alford, T. L. ; Laursen, T. ; Deng, F. ; Morton, R. ; Lau, S. S.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.337-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
2.

Conference Proceedings
Conference Proceedings
2. Encapsulation of Silver Via Nitridation of Ag/Ti Bilayer Structures
Zou, Y. L. ; Alford, T. L. ; Adams, D. ; Laursen, T. ; Tu, K.-N. ; Morton, R. ; Lau, S. S.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.355-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
3.

Conference Proceedings
Conference Proceedings
3. Cobalt and Titanium Metallization of SiGeC for Shallow Contacts
Bair, A. E. ; Alford, T. L. ; Atzmon, Z. ; Marcus, S. D. ; Doller, D. C. ; Morton, R. ; Lau, S. S. ; Mayer, J. W.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.529-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
4.

Conference Proceedings
Conference Proceedings
4. Analysis of Residual Stress in Polycrystalline Silver Thin Films by X-ray Diffraction
Alford, T. L. ; Zeng, Yuxiao ; Zou, Y. L. ; Deng, F. ; Lau, S. S. ; Laursen, T. ; Ullrich, B. Manfred
Pub. info.: Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A..  pp.293-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 472
5.

Conference Proceedings
Conference Proceedings
5. Influence of Underlayer and Encapsulation Process on Texture in Polycrystalline Silver Thin Films
Zeng, Yuxiao ; Zou, Y. L. ; Alford, T. L. ; Deng, F. ; Lau, S. S. ; Laursen, T. ; Ullrich, B. Manfred
Pub. info.: Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A..  pp.203-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 472
6.

Conference Proceedings
Conference Proceedings
6. TEM Observations of Ag-Ti Bilayers After Thermal Aging Treatment in a Reducing Ambient
Amali, Adam I. ; Mayer, J. W. ; Zeng, Yuxiao ; Zou, Y. L. ; Alford, T. L. ; Deng, F. ; Lau, S. S.
Pub. info.: Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A..  pp.197-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 472