Blank Cover Image

Deposition of Titanium Nitride Films in a Stagnation Flow Reactor and Comparison With Model Predictions

Author(s):
Allendorf, M.D.
Arsenlis, A.
Bastasz, R.
Evans, G.H.
Larson, R.S.
Schulberg, M.T.
1 more
Publication title:
Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-9
Pub. Year:
1997
Page(from):
291
Page(to):
299
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771368 [1566771366]
Language:
English
Call no.:
E23400/97-9
Type:
Conference Proceedings

Similar Items:

Larson, R.S., Allendorf, M.D.

Electrochemical Society

Winters, W.S., Evans, G.H.

Electrochemical Society

Allendorf, M.D., Osterheld, T.H.

Electrochemical Society

Tripathi, A., Boyd, D., Gallivait, M., Atsvater, H., Murray, R., Goodwin, D., Raja, L.R., Kee, R.J., Musoif, J.

Electrochemical Society

Soe, W-H., Kitagaki, T., Ueda, H., Shima, N., Otsuka, M., Yamamoto, R.

MRS - Materials Research Society

McDaniel, A.H., Allendorf, M.D.

Electrochemical Society

Thompson, A.G., Zawadzki, P., Armour, E., Stall, R.A., Evans, G.H.

Electrochemical Society

Joh, S., Evans, G.H.

Electrochemical Society

McDaniel, A.H., Allendorf, M.D.

Electrochemical Society

Allendorf, M.D., Janssen, C.L., Colvin, M.E., Melius, C.F., Nielsen, I.M.B., Osterheld, T.H., Ho, P.

Electrochemical Society

Winter, Charles H., McKarns, Peggy J., Scheper, Joseph T.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12