1.

Conference Proceedings

Conference Proceedings
Allendorf, M.D. ; Arsenlis, A. ; Bastasz, R. ; Evans, G.H. ; Larson, R.S. ; Schulberg, M.T.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.291-299,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
2.

Conference Proceedings

Conference Proceedings
Larson, R.S. ; Allendorf, M.D.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.41-46,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5