1.

Conference Proceedings
Conference Proceedings
1. Low-Temperature Low-Stress Silicon Nitride for Optoelectronic Applications Prepared by Electron-Cyclotron Resonance Plasma Chemical Vapor Deposition
Belkouch, S. ; Landheer, D. ; Taylor, R. ; Rajesh, K. ; Sproule, G. I.
Pub. info.: Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A..  pp.151-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 446
2.

Conference Proceedings
Conference Proceedings
2. Electrical Characterization of Thin Anodic Corona-Discharge-Processed SiO2 Films on Sili-con
Sayedi, S.M. ; Landsberger, L.M. ; Kahrizi, M. ; Belkouch, S. ; Landheer, D.
Pub. info.: Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.469-480,  1997.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-10