Deep-ultraviolet antireflective coating with improved conformality,optical density,and etch rate
- Author(s):
Guerrero,D.J. ( Brewer Science,Inc. ) Meador,J.D. ( Brewer Science,Inc. ) Xu,G. ( Brewer Science,Inc. ) Suzuki,H. ( Nissan Central Research Institute (Japan) ) Sone,Y. ( Nissan Central Research Institute (Japan) ) Krishnamurthy,V. ( Brewer Science Inc. ) Claypool,J. ( Brewer Science Inc. ) Lamb,III,J.E. ( Brewer Science Inc. ) - Publication title:
- Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3333
- Pub. Year:
- 1998
- Vol.:
- Part 1
- Page(from):
- 228
- Page(to):
- 235
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427786 [0819427780]
- Language:
- English
- Call no.:
- P63600/3333
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
7
Conference Proceedings
Broadband planarizing antireflective coating for i-line, DUV, and 193-nm microlithographic applications
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Development of full-fill bottom bottom antireflective coatings for dual-damascene process
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Advancements in organic antireflective coatings for dual-damascene processes
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Improved crosslinkable polymeric binders for 193-nm bottom antireflective coatings (BARCs)
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Fast-etch antireflective coating for sub-0.35-ヲフm i-line microlithography applications
SPIE-The International Society for Optical Engineering |