1.

Conference Proceedings
Conference Proceedings
1. The Present Status and Recent Advancements in Corona-Kelvin Non-Contact Electrical Metrology of Dielectrics for IC-Manufacturing
M. Wilson ; D. Marinskiy ; A. Byelyayev ; J. D'Amico ; A. Findlay ; L. Jastrzebski ; J. Lagowski
Pub. info.: Physics and technology of high-k gate dielectrics 4.  pp.3-24,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(3)
2.

Conference Proceedings
Conference Proceedings
2. New approach to measuring oxide charge and mobile ion concentration
P. Edelman ; A.M. Hoff ; L. Jastrzebski ; J. Lagowski
Pub. info.: Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas.  pp.154-164,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2337