1.

Conference Proceedings
Conference Proceedings
1. Hierarchical processing for accurate optical proximity correction for 1-Gb DRAM metal layers
Kobayashi,S. ; Uno,T. ; Yamamoto,K. ; Tanaka,S. ; Kotani,T. ; Inoue,S. ; Higurashi,H. ; Watanabe,S. ; Yano,M. ; Ohki,S. ; Tsunakawa,K.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.614-621,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. MAXI (monitor of all-sky x-ray image) for JEM on the Space Station
Matsuoka,M. ; Kawai,N. ; Mihara,T. ; Yoshida,A. ; Kubo,H. ; Kotani,T. ; Negoro,H. ; Rubin,B. C. ; Shimizu,H. ; Tsunemi,H. ; Hayashida,K. ; Kitamoto,S. ; Miyata,E. ; Yamauchi,M.
Pub. info.: EUV, X-ray, and gamma-ray instrumentation for astronomy VIII : 30 July - 1 August 1997, San Diego, California, Oswald H. W. Siegmund, Mark A. Gummin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.  pp.414-421,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3114