1.

Conference Proceedings
Conference Proceedings
1. Novel combined low-coherence interferometry spectrally resolved reflectometry compatible with high-resolution Raman spectroscopy for nondestructive characterization of MEMS・ structures [6111-26]
Walecki, W. J. ; Azfar, T. ; Pravdivstev, A. ; SantosII, M. ; Wong, T. ; Feng, A. ; Koo, A.
Pub. info.: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V.  pp.61110M-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6111
2.

Conference Proceedings
Conference Proceedings
2. Low-coherence interferometric absolute distance gauge for study of MEMS structures
Walecki, W.J. ; Lai, K. ; Pravdivtsev, A. ; Souchkov, V. ; Van, P. ; Azfar, T. ; Wong, T. ; Lau, S.H. ; Koo, A.
Pub. info.: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV.  pp.182-188,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5716