1.

Conference Proceedings
Conference Proceedings
1. ELECTRICAL CHARACTERIZATION OF SILICON WITH BURIED DEFECTS
Honeycutt, J. ; Radzimski, Z. ; Kola, R. R. ; Salih, A. S. M. ; Rozgonyi, G. A.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.121-124,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
2.

Conference Proceedings
Conference Proceedings
2. DEFECT AND DOPANT CONTROL DURING SILICON EPITAXY USING B AND Ge
Kola, R. R. ; Posthill, J. B. ; Salih, A. S. M. ; Rozgonyi, G. A. ; Bean, K. E. ; Lindberg, K.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.641-644,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
3.

Conference Proceedings
Conference Proceedings
3. INVESTIGATION OF METAL INDUCED SURFACE DEFECTS IN CZOCHRALSKI Si FOLLOWING RAPID THERMAL PROCESSING BY THERMAL WAVE MODULATED REFLECTANCE METHOD
Hahn, S. ; Smith, W. L. ; Suga, H. ; Park, J. G. ; Lim, C. S. ; Kwak, Y.-S. ; Meinecke, R. ; Kola, R. R. ; Rozgonyi, G. A. ; Kwack, K. D.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.81-88,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
4.

Conference Proceedings
Conference Proceedings
4. MICROSTRUCTURE AND ELECTROMIGRATION PROPERTIES OF SUBMICRON Al(.5%Cu) LINES
Prybyla, J. A. ; Kola, R. R. ; Hull, R. ; Eaglesham, D. J. ; Huggins, H. A.
Pub. info.: Mechanisms of thin film evolution.  pp.219-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 317
5.

Conference Proceedings
Conference Proceedings
5. Fabrication of Ta2O5 Thin Films by Anodic Oxidation of Tantalum Nitride and Tantalum Silicide: Growing Mechanisms, Electrical Characterization and ULSI M-I-M Capacitor Performances
Duenas, S. ; Castan, H. ; Barbolla, J. ; Kola, R. R. ; Sullivan, P. A.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.371-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
6.

Conference Proceedings
Conference Proceedings
6. TUNABILITY OF INTRINSIC STRESS IN SiOx DIELECTRIC FILMS FORMED BY MOLECULAR BEAM DEPOSITION
Chand, Naresh ; Kola, R. R. ; Osenbach, J. W. ; Tsang, W. T.
Pub. info.: Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.195-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 356
7.

Conference Proceedings
Conference Proceedings
7. IN-SITU STRESS CONTROL DURING SPUTTER DEPOSITION
Kola, R. R. ; Miller, G. L. ; Celler, G. K.
Pub. info.: Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A..  pp.275-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 306
8.

Conference Proceedings
Conference Proceedings
8. CONTROL OF MICROSTRUCTURE AND STRESS IN SPUTTERED TUNGSTEN THIN FILMS ON SILICON
Kola, R. R. ; Celler, G. K.
Pub. info.: Mechanical behavior of materials and structures in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.235-240,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 226
9.

Conference Proceedings
Conference Proceedings
9. MICROSTRUCTURAL EVOLUTION AND STRESS RELAXATION IN SPUTTERED TUNGSTEN FILMS
Ross, F. M. ; Kola, R. R. ; Hull, R. ; Bean, J. C.
Pub. info.: Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.697-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 318