1.

Conference Proceedings
Conference Proceedings
1. The epoxidation of allylchlorides with Hydrogen Peroxide over TS-1
Kitano, T. ; Kikuzono, Y.
Pub. info.: Science and technology in catalysis 1998 : proceedings of the Third Tokyo Conference on Advanced Catalytic Science and Technology, Tokyo, July 19-24, 1998.  pp.355-,  1999.  Tokyo.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 121
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Conference Proceedings
Conference Proceedings
2. *DEFECT ANALYSIS IN VLSI DEVICES BY TEM OBSERVATION AND PROCESS SIMULATION
Mikoshiba,. H. ; Nishio,. N. ; Matsumoto, T. ; Kikuchi, H. ; Kitano, T. ; Kaneko, H.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.629-640,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
3.

Conference Proceedings
Conference Proceedings
3. DEFECT ANNIHILATION IN CZOCHRALSKI-GROWN SILICON DURING OUT-DIFFUSION PROCESS PROBED WITH VARIABLE-ENERGY POSITRON BEAM
Kitano, T. ; Wei, L. ; Tabuki, Y. ; Tanigawa, S. ; Mikoshiba, H.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.707-712,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
4.

Conference Proceedings
Conference Proceedings
4. Growth of Group III Nitrides on Various Plane Substrates
Amano, H. ; Honshio, A. ; Kitano, T. ; Miyake, Y. ; lida, K. ; Kawashima, T. ; Imura, M. ; Balakrishnan, K. ; Iwaya, M. ; Kamiyama, S. ; Akasaki, I.
Pub. info.: State-of-the-art program on compound semiconductors XLI and nitride and wide bandgap semiconductors for sensors, photonics, and electronics V : proceedings of the international symposia.  pp.192-199,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-06
5.

Conference Proceedings
Conference Proceedings
5. Selective Etching of GaAs/AlxGa1-xAs for Heterostructure Field Effect Transistors
Kitano, T. ; Izumi, S. ; Minami, H. ; Takano, H. ; Sato, K. ; Ishihara, O.
Pub. info.: Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII).  pp.327-336,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-21
6.

Conference Proceedings
Conference Proceedings
6. EFFECT OF ITOX-PROCESS ON THE ELECTRICAL CHARACTERISTICS OF BURIED OXIDE IN LOW-DOSE SIMOX
Hamada, K. ; Hamajima, T. ; Kitano, T. ; Ohnishi, H. ; Yoshino, A.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1395-1405,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
7.

Conference Proceedings
Conference Proceedings
7. Effects of Vacancy-Type Defects on Electrical Activation of P+ Implanted Into Silicon
Watanabe, M. ; Kitano, T. ; Asada, S. ; Uedono, A. ; Moriya, T. ; Kawano, T. ; Tanigawa, S. ; Suzuki, R. ; Ohdaira, T. ; Mikado, T.
Pub. info.: Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.95-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 439
8.

Conference Proceedings
Conference Proceedings
8. Effect of Oxygen on the Formation of Dryetching Damage Introduced Into Si-Substrate
Hamada, K. ; Kitano, T.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.513-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
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Conference Proceedings
Conference Proceedings
9. Annealing Properties of Defects in BF2+ Implanted Si
Kitano, T. ; Watanabe, M. ; Yaoita, A. ; Oguro, S. ; Uedono, A. ; Moriya, T. ; Tanigawa, S. ; Kawano, T. ; Suzuki, R. ; Ohdaira, T. ; Mikado, T.
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.137-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
10.

Conference Proceedings
Conference Proceedings
10. Effects of Vacancy-Type Defects on Electrical Activation of P+ Implanted Into Silicon
Watanabe, M. ; Kitano, T. ; Asada, S. ; Uedono, A. ; Moriya, T. ; Kawano, T. ; Tanigawa, S. ; Suzuki, R. ; Ohdaira, T. ; Mikado, T.
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.131-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
11.

Conference Proceedings
Conference Proceedings
11. Segregation of Si and Cu at AlSiCu/TiN Interfaces
Kameyama, A. ; Yaoita, A. ; Kitano, T. ; Saito, S.
Pub. info.: Structure and properties of multilayered thin films : symposium held April 17-19, 1995, San Francisco, California, U.S.A..  pp.407-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 382
12.

Conference Proceedings
Conference Proceedings
12. Annealing Properties of Defects in BF2+-Implanted Si
Kitano, T. ; Watanabe, M. ; Yaoita, A. ; Oguro, S. ; Uendno, A. ; Moriya, T. ; Tanigawa, S. ; Kawano, T. ; Suzuki, R. ; Ohdaira, T. ; Mikado, T.
Pub. info.: Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.143-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 439
13.

Conference Proceedings
Conference Proceedings
13. Oxidation of Naphthalene on Palladium Based Catalyst
Sasaki, K. ; Kunai, A. ; Kuroda, Y. ; Kitano, T.
Pub. info.: Dioxygen activation and homogeneous catalytic oxidation : proceedings of the Fourth International Symposium on Dioxygen Activation and Homogeneous Catalytic Oxidation.  pp.137-,  1991.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 66
14.

Conference Proceedings
Conference Proceedings
14. Evaluation of resist-film property for CD control
Shinya, H. ; Kitano, T. ; Matsui, H. ; Kitano, J.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part Two  pp.690-702,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
15.

Conference Proceedings
Conference Proceedings
15. Model of coating and drying process for flat polymer film fabrication
Kagami, H. ; Miyagawa, R. ; Kawata, A. ; Nakashima, D ; Kobayashi, S. ; Kitano, T. ; Takeshita, K. ; Kubota, H. ; Ohmi, T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.252-259,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754
16.

Conference Proceedings
Conference Proceedings
16. Evaluation of resist-film property by scan- and spin-coating
Shinya, H. ; Ishii, T. ; Wakamoto, Y. ; Sugimoto, S. ; Kitano, T.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.939-950,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376