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16 results

Conference Proceedings

1. The epoxidation of allylchlorides with Hydrogen Peroxide over TS-1

Kitano, T. ; Kikuzono, Y.

Pub. info.:	Science and technology in catalysis 1998 : proceedings of the Third Tokyo Conference on Advanced Catalytic Science and Technology, Tokyo, July 19-24, 1998. pp.355-, 1999. Tokyo. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	121

Conference Proceedings

2. *DEFECT ANALYSIS IN VLSI DEVICES BY TEM OBSERVATION AND PROCESS SIMULATION

Mikoshiba,. H. ; Nishio,. N. ; Matsumoto, T. ; Kikuchi, H. ; Kitano, T. ; Kaneko, H.

Pub. info.:	Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.629-640, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	262

Conference Proceedings

3. DEFECT ANNIHILATION IN CZOCHRALSKI-GROWN SILICON DURING OUT-DIFFUSION PROCESS PROBED WITH VARIABLE-ENERGY POSITRON BEAM

Kitano, T. ; Wei, L. ; Tabuki, Y. ; Tanigawa, S. ; Mikoshiba, H.

Pub. info.:	Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.707-712, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	262

Conference Proceedings

4. Growth of Group III Nitrides on Various Plane Substrates

Amano, H. ; Honshio, A. ; Kitano, T. ; Miyake, Y. ; lida, K. ; Kawashima, T. ; Imura, M. ; Balakrishnan, K. ; Iwaya, M. ; Kamiyama, S. ; Akasaki, I.

Pub. info.:	State-of-the-art program on compound semiconductors XLI and nitride and wide bandgap semiconductors for sensors, photonics, and electronics V : proceedings of the international symposia. pp.192-199, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-06

Conference Proceedings

5. Selective Etching of GaAs/AlxGa1-xAs for Heterostructure Field Effect Transistors

Kitano, T. ; Izumi, S. ; Minami, H. ; Takano, H. ; Sato, K. ; Ishihara, O.

Pub. info.:	Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII). pp.327-336, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-21

Conference Proceedings

6. EFFECT OF ITOX-PROCESS ON THE ELECTRICAL CHARACTERISTICS OF BURIED OXIDE IN LOW-DOSE SIMOX

Hamada, K. ; Hamajima, T. ; Kitano, T. ; Ohnishi, H. ; Yoshino, A.

Pub. info.:	Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1395-1405, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-1(2)

Conference Proceedings

7. Effects of Vacancy-Type Defects on Electrical Activation of P+ Implanted Into Silicon

Watanabe, M. ; Kitano, T. ; Asada, S. ; Uedono, A. ; Moriya, T. ; Kawano, T. ; Tanigawa, S. ; Suzuki, R. ; Ohdaira, T. ; Mikado, T.

Pub. info.:	Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.95-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	439

Conference Proceedings

8. Effect of Oxygen on the Formation of Dryetching Damage Introduced Into Si-Substrate

Hamada, K. ; Kitano, T.

Pub. info.:	Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.513-, 1998. Warrendale, Pa. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	510

Conference Proceedings

9. Annealing Properties of Defects in BF2+ Implanted Si

Kitano, T. ; Watanabe, M. ; Yaoita, A. ; Oguro, S. ; Uedono, A. ; Moriya, T. ; Tanigawa, S. ; Kawano, T. ; Suzuki, R. ; Ohdaira, T. ; Mikado, T.

Pub. info.:	Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.137-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	438

10.

Conference Proceedings

10. Effects of Vacancy-Type Defects on Electrical Activation of P+ Implanted Into Silicon

Watanabe, M. ; Kitano, T. ; Asada, S. ; Uedono, A. ; Moriya, T. ; Kawano, T. ; Tanigawa, S. ; Suzuki, R. ; Ohdaira, T. ; Mikado, T.

Pub. info.:	Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.131-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	438

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