1.

Conference Proceedings
Conference Proceedings
1. Effects of Vacancy-Type Defects on Electrical Activation of P+ Implanted Into Silicon
Watanabe, M. ; Kitano, T. ; Asada, S. ; Uedono, A. ; Moriya, T. ; Kawano, T. ; Tanigawa, S. ; Suzuki, R. ; Ohdaira, T. ; Mikado, T.
Pub. info.: Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.95-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 439
2.

Conference Proceedings
Conference Proceedings
2. Annealing Properties of Defects in BF2+ Implanted Si
Kitano, T. ; Watanabe, M. ; Yaoita, A. ; Oguro, S. ; Uedono, A. ; Moriya, T. ; Tanigawa, S. ; Kawano, T. ; Suzuki, R. ; Ohdaira, T. ; Mikado, T.
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.137-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
3.

Conference Proceedings
Conference Proceedings
3. Effects of Vacancy-Type Defects on Electrical Activation of P+ Implanted Into Silicon
Watanabe, M. ; Kitano, T. ; Asada, S. ; Uedono, A. ; Moriya, T. ; Kawano, T. ; Tanigawa, S. ; Suzuki, R. ; Ohdaira, T. ; Mikado, T.
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.131-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
4.

Conference Proceedings
Conference Proceedings
4. Annealing Properties of Defects in BF2+-Implanted Si
Kitano, T. ; Watanabe, M. ; Yaoita, A. ; Oguro, S. ; Uendno, A. ; Moriya, T. ; Tanigawa, S. ; Kawano, T. ; Suzuki, R. ; Ohdaira, T. ; Mikado, T.
Pub. info.: Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.143-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 439